Browse Prior Art Database

Epitaxial Double Sided Circuitry

IP.com Disclosure Number: IPCOM000045338D
Original Publication Date: 1983-Mar-01
Included in the Prior Art Database: 2005-Feb-06
Document File: 2 page(s) / 54K

Publishing Venue

IBM

Related People

Alessandrini, EI: AUTHOR [+2]

Abstract

This invention relates to circuitry fabricated on silicon or silicon like wafers of chips and is applicable to very large scale integrated (VLSI) circuits. It is also directly related to Josephson circuits.

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Epitaxial Double Sided Circuitry

This invention relates to circuitry fabricated on silicon or silicon like wafers of chips and is applicable to very large scale integrated (VLSI) circuits. It is also directly related to Josephson circuits.

Fine lines or nanostructures and other electron microscope applications have recently made extensive use of window substrates, an example of which is shown in Fig. 1. These window chips are fabricated by patterning the back of the wafer, and many windows are fabricated at the same time; this is illustrated in Fig. 2. The pattern of the windows can be regular or formed in almost any desired pattern by controlling the masking and subsequent etching. In fact, the detailed patterning of the back (or one side) of the wafer is an important part of this invention.

The prime embodiment of this invention is shown in Figs. 3 and 4. In Fig. 3, we show a window configuration cut in a silicon wafer where in the membrane is the top part of the silicon wafer. No additional material such as SiO(2) or Si(3)N(4) has been deposited on the top surface. The etching which forms the window can be stopped within a few monolayers of the surface, and Si windows of up to several thousand angstroms thick are possible. By using the pure Si surface (both top and bottom) as the substrate for fabricating subsequent circuitry, a unique advantage is obtained; i.e., a single crystal surface is used as the substrate for the subsequent circuitry. In this way, epitaxial growth of the circuitry can be used to get, for example, single crystal or large grain polycrystal metal lines. Improved and controlled...