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In Situ Specimen Temperature Monitor for UHV Chamber

IP.com Disclosure Number: IPCOM000045805D
Original Publication Date: 1983-Apr-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

Cain, JF: AUTHOR [+2]

Abstract

The study of a number of materials phenomena such as interdiffusion and phase transformation, requires the use of analytical UHV (ultra high vacuum) systems, i.e. Auger Electron Spectroscopy X-Ray Photoelectron Spectroscopy and Ultraviolet Photoemission Spectroscopy and the performance of an in-situ heat treatment. The measurement and monitoring of the specimen temperature is essential in these studies.

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In Situ Specimen Temperature Monitor for UHV Chamber

The study of a number of materials phenomena such as interdiffusion and phase transformation, requires the use of analytical UHV (ultra high vacuum) systems, i.e. Auger Electron Spectroscopy X-Ray Photoelectron Spectroscopy and Ultraviolet Photoemission Spectroscopy and the performance of an in-situ heat treatment. The measurement and monitoring of the specimen temperature is essential in these studies.

A device is shown and described which affords precise temperature measurement and monitoring for all loaded specimens. The basic feature of the device is the coupling of (a) a linear mechanical feedthrough and (b) an electrical feedthrough on a standard, 2 3/4-inch diameter UHV system port flange.

The mechanical feedthrough is effected by means of a stainless steel bellows (1-inch working range). One end of it is electron beam welded to the inside face of the stainless steel flange, and the other end onto a 1/8-inch diameter pushrod passing through it, and a hole in the flange.

The electrical feedthroughs are a part of CHROMEL-ALUMEL(Trademark of Hoskins Manufacturing Co leads with metal ceramic metal junctions. The latter metal (flange) is electron beam welded onto the port flange. To these feedthrough leads is appropriately connected a CHROMEL-ALUMEL thermocouple passing through ceramic (insulating) beads and a ceramic two- lead rod, ending at a pushed tip. The thermocouple is fastened onto the linearly movabl...