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Browse Prior Art Database

Ceramic Boat

IP.com Disclosure Number: IPCOM000045832D
Original Publication Date: 1983-Apr-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 2 page(s) / 57K

Publishing Venue

IBM

Related People

DalCero, N: AUTHOR [+2]

Abstract

A single ceramic boat is designed to qualify for use in several heat related process steps with a single temperature profile for all product types processed. The boat, used for carrying MLC (multilayer ceramic) substrates, is employed, for example, through metal diffusion, 24-hour bake and plasma ashing steps.

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Ceramic Boat

A single ceramic boat is designed to qualify for use in several heat related process steps with a single temperature profile for all product types processed. The boat, used for carrying MLC (multilayer ceramic) substrates, is employed, for example, through metal diffusion, 24-hour bake and plasma ashing steps.

As shown in the figure, multichip substrate modules 1 are positioned within the respective nests in nest plate 3. Base plate 5 is positioned beneath nest plate 3 to support the substrate modules so that they float within the nests. As shown, tabs 7 are tapered to permit the substrates to slide into the nest.

The boat assembly shown accommodates 50 mm substrate modules. However, the boat assembly is such that nest plate 3 may be changed to accommodate other size substrate modules. For example, the nest plate may be configured to accommodate 90 mm, 64 mm or 35 mm substrate modules. In this regard, the 90 mm substrate nest plate, for example, only accommodates one 90 mm substrate module. By using the same base plate with nest plates specifically configured to accommodate particular substrate modules, the same mass and, therefore, temperature profile is maintained.

After the heat-related steps are completed, subsequent chemical steps necessitate the use of a plastic boat. A matching plastic boat (not shown) having the same nest pattern may be positioned over the ceramic boat via alignment pins 9 such that the ceramic boat may be flipped over to loa...