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Browse Prior Art Database

Templates for Substrate Inspections

IP.com Disclosure Number: IPCOM000045920D
Original Publication Date: 1983-May-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Abbott, CD: AUTHOR [+3]

Abstract

An optical template selectively allows or prevents inspection of surface irregularities of a substrate.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 100% of the total text.

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Templates for Substrate Inspections

An optical template selectively allows or prevents inspection of surface irregularities of a substrate.

A method of eliminating inspection and subsequent rejection of substrates, due to irregularities in areas of surface that correspond to non-functional areas, is to implement templates that can be laid over the substrates to separate functional areas of the surface from non-functional areas.

In other words, an overlay that covers non-functional areas, and is transparent over functional areas, can be placed upon the substrates so that visual inspection of the substrates is only over the functional areas. This overlay, or template, can be obtained by reproducing the patterns of a functional mask on a flexible medium. Also, the transparent regions on the overlay can be appropriately oversized so that an error associated with the alignment of the overlay with respect to the substrate edges is compensated for. Once the design of the template is complete, multiple sets of the template can be obtained at small cost, so that the template becomes an expendable/throwaway item.

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