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Reactive Evaporation or Sputtering of Metal-Metal Oxide Printing Film Ribbon

IP.com Disclosure Number: IPCOM000045940D
Original Publication Date: 1983-May-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Aviram, A: AUTHOR [+4]

Abstract

Metal-metal oxide or metal insulator films such as Al/x/(Al/2/O/3/)/l-x/, Cr/x/(Al/2/O/3/)/l-x/, Ti/x/(Al/2/O/3/)/l-x/, etc., proposed as candidates for thermal transfer printing ribbons, can be economically manufactured in quantity using single-source sputtering of the metal in an atmosphere containing oxygen.

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Reactive Evaporation or Sputtering of Metal-Metal Oxide Printing Film Ribbon

Metal-metal oxide or metal insulator films such as Al/x/(Al/2/O/3/)/l-x/, Cr/x/(Al/2/O/3/)/l-x/, Ti/x/(Al/2/O/3/)/l-x/, etc., proposed as candidates for thermal transfer printing ribbons, can be economically manufactured in quantity using single-source sputtering of the metal in an atmosphere containing oxygen.

A separate and yet very important issue is the question of possible manufacture of these resistive films fast and at a reasonable cost. These films have been made by two-source E-beam evaporation, with the individual rates of evaporation adjusted separately in each source to yield the proper composition. For large-scale preparation, a different method should be employed; preferably, a single source should be utilized for the process.

Two other questions should be addressed when considering manufacturability, i.e., the rates of production and energy cost. It is clear that metals evaporate at a faster rate and at lower temperature than their oxides. Therefore, using metals rather than their oxides as evaporation sources is more economical and productive.

The resistive films can be prepared by chemically reacting in the vapor phase the metal vapor with a partial pressure of oxygen. The resistivity of metal-oxide films can be varied by incorporating oxygen into the vapor mixture during evaporation.

Magnetron sputtering of these films is a desirable process for depositing composite fil...