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Improved Adhesion Between Metal and Polymer Surfaces

IP.com Disclosure Number: IPCOM000045946D
Original Publication Date: 1983-May-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Cuomo, JJ: AUTHOR [+3]

Abstract

This process improves the adhesion between the metal film and a polymer surface on which the metal film is deposited. It is a dry process in which an initial metal nucleating layer is deposited on the polymer. The polymer surface is then roughened using a reactive plasma texturing process. A metal film is then deposited onto the roughened surface.

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Improved Adhesion Between Metal and Polymer Surfaces

This process improves the adhesion between the metal film and a polymer surface on which the metal film is deposited. It is a dry process in which an initial metal nucleating layer is deposited on the polymer. The polymer surface is then roughened using a reactive plasma texturing process. A metal film is then deposited onto the roughened surface.

The nucleating layer is a thin, non-continuous layer of an appropriate material, typically a few nanometers thick. It may be deposited by evaporation, sputtering, etc. The material of this layer may even be incorporated as a constituent in the initial polymer. The nuclei (or islands) of the metal form a non- continuous layer on the polymer surface, producing a random mask for the subsequent etching process.

The texturing step is one in which the coated polymer surface is treated with a reactive plasma. A diode sputtering system and plasmas of oxygen gas can be used. In this system, the substrates are placed on the driven electrode. Air and other gases can also be used for this reactive treatment. Low power densities and low electrode voltages are preferred. The etching process that provides texturing should be controlled to yield isotropic etching, rather than anisotropic etching. As an example, thick copper films have been plated onto epoxy that has been textured with an oxygen plasma.

After the surface is textured, a metal film is deposited on the polymer. The metal...