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High Sensitivity Contamination Probe

IP.com Disclosure Number: IPCOM000045957D
Original Publication Date: 1983-May-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Demuth, JE: AUTHOR [+2]

Abstract

Tunneling spectroscopy is a useful technique for measuring the vibrational spectra of extremely small quantities of impurities at insulator/metal interfaces. In this technique, the impurity to be analyzed is placed on the insulating layer, after which an electrode is deposited to complete the tunnel device.

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High Sensitivity Contamination Probe

Tunneling spectroscopy is a useful technique for measuring the vibrational spectra of extremely small quantities of impurities at insulator/metal interfaces. In this technique, the impurity to be analyzed is placed on the insulating layer, after which an electrode is deposited to complete the tunnel device.

In order to study extremely small quantities of organic material vapor transported or exuded from some parent object, freshly oxidized aluminum films can be exposed by being placed in close proximity to the samples, either in vacuum, air, or water. The materials, vapor transported or exuded from the parent object, chemisorb to the aluminum oxide. The tunnel junction device is then completed by depositing an electrode, and the usual tunneling spectroscopy is done.

As an example, an organic contaminant can be observed by tunneling spectroscopy where the polymer containing the organic contaminant is immersed in water. After soaking the polymer in the water for a few days, a drop of the resulting weak solution is used to dope a tunnel junction. As an alternative, the polymer can be placed close to the aluminum oxide for a few minutes to allow vapor transport of the organic contaminant. Both procedures show the same organic contaminant.

Although Al/Al/2/O/3//PP tunnel junction structures are suitable, a wide range of materials can be used. The materials chosen are those which are relevant to a particular contamination problem. F...