Browse Prior Art Database

BUTYROLACTONE AS A STRIPPING SOLVENT IN LIFT-OFF PROCESS

IP.com Disclosure Number: IPCOM000046035D
Original Publication Date: 1983-May-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Migliore, MJ: AUTHOR

Abstract

Butyrolactone can be used as a solvent to dissolve and remove the decal in the lift-off step of the semiconductor metallization, as described in U.S. Patent 3,873,361. When used as a hot solvent (140C), it has the advantage of not oxidizing and forming insoluble polymeric materials as readily as N-methyl 2-pyrrolidone. Lift-off times are comparable.

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BUTYROLACTONE AS A STRIPPING SOLVENT IN LIFT-OFF PROCESS

Butyrolactone can be used as a solvent to dissolve and remove the decal in the lift-off step of the semiconductor metallization, as described in U.S. Patent 3,873,361. When used as a hot solvent (140C), it has the advantage of not oxidizing and forming insoluble polymeric materials as readily as N-methyl 2-pyrrolidone. Lift-off times are comparable.

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