Browse Prior Art Database

Large Bell Jar for Evaporator to Increase Wafer Throughput

IP.com Disclosure Number: IPCOM000046037D
Original Publication Date: 1983-May-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 2 page(s) / 74K

Publishing Venue

IBM

Related People

Dahlke, GP: AUTHOR [+4]

Abstract

This article concerns an improved bell jar and suspension for a vacuum system. The bell jar and suspension includes a two-part jar assembly having a fixed cylindrical lower section and a removable lid. The lid is carried by a suspension which permits raising and lowering as well as rotation relative to the lower section.

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Large Bell Jar for Evaporator to Increase Wafer Throughput

This article concerns an improved bell jar and suspension for a vacuum system. The bell jar and suspension includes a two-part jar assembly having a fixed cylindrical lower section and a removable lid. The lid is carried by a suspension which permits raising and lowering as well as rotation relative to the lower section.

A conventional bell jar for a vacuum system is one piece, and is opened and closed by means of a hinge. This construction can result in improper closing of the jar, causing particles to be sucked into the system when the system is evacuated.

The bell jar design of this article is shown in Figs. 1 and 2. As shown in Fig. 1, jar 1 includes a lower cylindrical section 2 which is clamped to vacuum system 13 at flange 8 and a removable upper lid 3. Lid 3 is rendered removable by a suspension system 4 including gear box 5, spindle 6 and yoke 7. Lid 3 is mounted to a yoke 7 on two pivot pins 9, with yoke 7, in turn, being mounted to spindle 6 of gear box 5, as seen in Fig. 2.

In operation, when the vacuum system is at atmosphere, a crank 11 of gear box 5 is rotated. This permits lid 3 and a wafer dome 10, which may be attached thereto, to be removed from the vacuum system. When lid 3 is lowered, it rests on the upper face of lower section 2. Pivot pins 9 insure proper closing of the bell jar to avoid contaminants being sucked into the system when it is evacuated.

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