Browse Prior Art Database

OPTICAL MEASURING SYSTEM TO 7500X MAGNIFICATION (0.l MICRON)

IP.com Disclosure Number: IPCOM000046054D
Original Publication Date: 1983-May-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 2 page(s) / 72K

Publishing Venue

IBM

Related People

Knapp, DG: AUTHOR [+4]

Abstract

This article concerns apparatus and method for quickly detecting and measuring sub-micron deflection of X-Y mask positioning in an electron-beam lithography system. The structure and steps measure physical decline using optical and video means.

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OPTICAL MEASURING SYSTEM TO 7500X MAGNIFICATION (0.l MICRON)

This article concerns apparatus and method for quickly detecting and measuring sub-micron deflection of X-Y mask positioning in an electron-beam lithography system. The structure and steps measure physical decline using optical and video means.

It is necessary for proper operation of an E-beam lithography system to quickly determine the accuracy of the X-Y positioning table. The apparatus to be described allows non-contact, direct measurement, without the influence of column E-beam variables, such as beam deflections caused by magnetic fields, eddy currents, and beam charging.

More particularly, and as shown in the figures, the apparatus 1, best seen in Fig. 1, includes an aluminum plate 2, with appropriate holes, for replacing the E- beam column 3 on the E-beam tool shown in Fig. 2. A microscope head 4 with modified illuminator 5 is mounted on a second plate 6, as seen in Fig. 1A. With reference to Figs. 1 and 1A, plate 6 is located on plate 2 at three points, 120 degrees apart, by the spindles 7 of the slave cylinders 8 of three hydraulic manipulators 9. The spindles 7 are located by three plates, one with a 90-- degree countersink, one with a 90-degree elongated countersink, and one with a flat surface. Actuator cylinders 10, with micrometer barrels ll, are mounted on a bracket 12 and connected to slave cylinders 8 by tubing 13 of sufficient length to allow their placement for remote focusing of the...