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Method of Producing SEM Pictures of Pores in Magnetic Disk Coatings

IP.com Disclosure Number: IPCOM000046067D
Original Publication Date: 1983-May-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Kempf, J: AUTHOR [+4]

Abstract

By sputtering, carbon is blanket deposited on the sample of a magnetic disk coating to be reproduced. Subsequently, gold is vapor deposited on the sample inclined at an angle of J 70Πto the vapor beam. The carbon, eliminating the electric charge in the pores during secondary electron imaging, and the gold, deposited only outside the pores, lead to different material contrast between porous and non-porous areas.

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Method of Producing SEM Pictures of Pores in Magnetic Disk Coatings

By sputtering, carbon is blanket deposited on the sample of a magnetic disk coating to be reproduced. Subsequently, gold is vapor deposited on the sample inclined at an angle of J 70OE to the vapor beam. The carbon, eliminating the electric charge in the pores during secondary electron imaging, and the gold, deposited only outside the pores, lead to different material contrast between porous and non-porous areas.

SEM (secondary electron microscopy) pictures of the sample, thus prepared, have a high-contrast reproduction of the pores.

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