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Method for Deposition of Patterned Thin Metal Films Without Use of Vacuum Chamber

IP.com Disclosure Number: IPCOM000046108D
Original Publication Date: 1983-Jun-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

McLachlan, DS: AUTHOR

Abstract

In the past a method was developed for depositing "sintered" palladium films on quartz substrates. The method involves spraying the substrate with a dilute acidified aqueous solution of PdCl2 and the subsequent evaporation of the liquids and decomposition of the salt with a reducing H2 flame (other reducing flames can be used).

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Method for Deposition of Patterned Thin Metal Films Without Use of Vacuum Chamber

Background

In the past a method was developed for depositing "sintered" palladium films on quartz substrates. The method involves spraying the substrate with a dilute acidified aqueous solution of PdCl2 and the subsequent evaporation of the liquids and decomposition of the salt with a reducing H2 flame (other reducing flames can be used). Good adhesion between the substrate and the palladium is obtained especially if the first layer palladium is baked by using a very hot flame. Resistivites of between one ohm per square and one hundred ohms per square are obtained by using this method.

In the literature a method is described for dissolving PtC12 in various oils, painting them on glass and subsequently burning off the organic material and decomposing PtC12 to form a continuous Pt coating.

Disclosure

Normal photolithographic techniques can be applied to non-vacuum- deposited films, as described above. Alternatively, metallic films are made in alloy form by placing two or more salts in the solution.

An appropriate metal salt(s) (inorganic or organometallic) can be dissolved in an aqueous photoresist (e.g., gelatine solution). On the other hand, if the salt is not soluble in the photoresist, colloidal salt (or even metal) particles can be incorporated in the photoresist. Then the photoresist is coated onto the substrate and is processed in the normal way to produce the desired pattern....