Browse Prior Art Database

Spray Developer and Etch Unit With Cleaning Spray Head

IP.com Disclosure Number: IPCOM000046232D
Original Publication Date: 1983-Jun-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 2 page(s) / 43K

Publishing Venue

IBM

Related People

Wetz, H: AUTHOR

Abstract

A system for spray-treating masks, wafers, substrates, and similar workpieces comprises a lid with spray jets used for different media. The inside of the lid is provided with a central spray head with jets for cleaning the inner walls of the container, in particular the lid surface.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Spray Developer and Etch Unit With Cleaning Spray Head

A system for spray-treating masks, wafers, substrates, and similar workpieces comprises a lid with spray jets used for different media. The inside of the lid is provided with a central spray head with jets for cleaning the inner walls of the container, in particular the lid surface.

The system for spray treatment consists of a housing 1 with a multi-wall lid 2 as well as a rotating workpiece carrier 3 with workpiece holders 4. The inside of the lid is provided with a number of jets 5, through which the media used for treatment are subsequently sprayed on to the workpieces. In addition, the inside of the lid is provided with a central spray head 6 which is preferably used to clean the inside of the lid between the individual successive process steps.

According to Fig. 2, spray head 6 is conically shaped and designed as a pressure chamber 7 with a central inlet port 8 for the cleaning media. Spray jet needles 1O are fixed to holding means 9, and the outer wall ll of chamber 7 has openings 12 for receiving jet needles. A sealing cap 13 serves to seal pressure chamber 7 and can be removed for adjusting spray jet needles 1O.

A cleaning medium and/or hot air for drying can be fed to spray head 6 between the individual process steps.

1

Page 2 of 2

2

[This page contains 2 pictures or other non-text objects]