Browse Prior Art Database

Particulate Simulator

IP.com Disclosure Number: IPCOM000046381D
Original Publication Date: 1983-Jul-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 2 page(s) / 25K

Publishing Venue

IBM

Related People

Mayko, FG: AUTHOR [+2]

Abstract

A coupon having particles of known dimension constructed on its surface is useful for calibrating a tool for detecting surface particulate on circuit panels.

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Particulate Simulator

A coupon having particles of known dimension constructed on its surface is useful for calibrating a tool for detecting surface particulate on circuit panels.

Referring to the drawing, metal plateaus of varying height and diameter are formed on a substrate by printed circuit techniques to simulate particulate of different sizes. These plateaus are preferably arranged in offset columns to avoid creation of interfering shadows when illuminated by oblique light. The detection tool and control parameters can be adjusted to detect either a portion or all plateaus, and the coupon can also serve as a go, no-go gauge for the detection tool on a daily basis.

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