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Versatile Magnet Assembly for Czochralski Silicon Crystal Growth

IP.com Disclosure Number: IPCOM000046387D
Original Publication Date: 1983-Jul-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 2 page(s) / 95K

Publishing Venue

IBM

Related People

Kim, KM: AUTHOR [+3]

Abstract

A versatile modular magnet assembly consisting of multiple pancake-type coils is described. It provides a flexible means to obtain appropriate magnetic fields for crystal growth.

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Versatile Magnet Assembly for Czochralski Silicon Crystal Growth

A versatile modular magnet assembly consisting of multiple pancake-type coils is described. It provides a flexible means to obtain appropriate magnetic fields for crystal growth.

Coaxial or transverse magnetic fields have been applied to the melt from which semiconductor monocrystalline boules are grown. This field suppresses fluid flow in the melt to improve the homogeneity of dopant and impurity distribution in the crystal.

This new experimental approach presents a versatile magnet design based on a modular coil assembly.

Fig. 1 illustrates schematically the application of a coaxial magnetic field for Czochralski silicon crystal growth. Multiple pancake-type coils 1 (in the example, five coils) are coaxially stacked up around the silicon crystal growth chamber 2. The modular design in conjunction with an appropriate thickness spacer 3 provides a flexible approach for shaping the magnetic field profile, and thus can vary or extend the magnetic field strength. The coils are water-cooled and connected electrically in series.

Fig. 2 is a schematic illustration of the Czochralski silicon crystal growth under a transverse magnetic field using a modular magnet assembly consisting of multiple pancake-type coils 1 in conjunction with a cryindrical yoke 11. Two sets of identical modules are positioned symmetrically across the growth chamber 2. The magnetic field is thus perpendicular to the vertical crystal...