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Browse Prior Art Database

Metal Mask Storage/Access/Transport Container

IP.com Disclosure Number: IPCOM000046401D
Original Publication Date: 1983-Jul-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 2 page(s) / 48K

Publishing Venue

IBM

Related People

DePorto, R: AUTHOR [+4]

Abstract

This article concerns a container for transporting and storing unpatterned semiconductor manufacturing masks. The mask container features an outer housing that accommodates internal trays for holding the masks. The trays are stackable and keyed within the outer housing.

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Metal Mask Storage/Access/Transport Container

This article concerns a container for transporting and storing unpatterned semiconductor manufacturing masks. The mask container features an outer housing that accommodates internal trays for holding the masks. The trays are stackable and keyed within the outer housing.

Particularly, the container of this article protects masks used in the making of integrated circuits. The container which can house multiple masks allows for mask transport and safe access in use.

The container is shown in Figs. 1A, 1B and 2A, 2B. As shown in Fig. 1A, the container features an outer housing 1, mask trays 2 and means for positive identification 3. Outer housing 1 is arranged to receive and hold independently stackable trays 2. As seen in Fig. 2A, trays 2 are provided with open ends 4 which allow removal of the masks in a slideable fashion from the tray. As shown, a hook and loop quick- release locking strap 5 is provided as a take-up mechanism to enable holding quantities of stacked masks. To prevent edge damage, the masks are stacked between an upper and lower support sheet 6. Support sheets 6 have tabs 7 that fit and are retained in respective slots 8 of the tray. Straps 5 are restrained from contacting the masks by also locating them in slots 8. As a result, straps 5 contact only tabs 7 of the support sheet and the top surface of top support 9 when the stack is strapped down in the tray. As seen in Fig. 2A, tray sides 10 protect the...