Browse Prior Art Database

Mobile Detector for a Scanning Electron Beam Microscope

IP.com Disclosure Number: IPCOM000046671D
Original Publication Date: 1983-Aug-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 2 page(s) / 50K

Publishing Venue

IBM

Related People

Via, G: AUTHOR

Abstract

In the preceding article, a stage having five degrees of freedom was disclosed for use in a scanning electron beam microscope chamber. In order to having complete flexibility in positioning the wafer feature being observed with respect to the detector (for those wafer features not coincident with the axis of rotation of the table 16), relative motion must be imparted to the detector itself, especially when the wafer 18 has been tilted through the X axis 5 or Z axis 10. Since, in a scanning electron beam microscope, the direction of the scattered beam is related to the direction of the incident beam in a manner similar to specular reflection; i.e.

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Mobile Detector for a Scanning Electron Beam Microscope

In the preceding article, a stage having five degrees of freedom was disclosed for use in a scanning electron beam microscope chamber. In order to having complete flexibility in positioning the wafer feature being observed with respect to the detector (for those wafer features not coincident with the axis of rotation of the table 16), relative motion must be imparted to the detector itself, especially when the wafer 18 has been tilted through the X axis 5 or Z axis 10. Since, in a scanning electron beam microscope, the direction of the scattered beam is related to the direction of the incident beam in a manner similar to specular reflection; i.e., where the angle of incidence equals the angle of reflection in a plane perpendicular to the plane of the reflecting surface, it can be seen that through tilting the wafer 18 along the X and Z axes, the scattered beam direction will no longer be toward the position of a conventional fixed detector. This problem is solved by the mobile detector invention disclosed in Figs. 1 and 2. Fig. 1 shows a side view of the stage mechanism which was disclosed in the preceding article. Added to the depiction of the stage is the structure of the detector-supporting mechanism. The detector-supporting mechanism includes the support beam 20 which is mounted to the base 2. A circular track 22 is mounted to the beam 20 and serves to define the desired circular motion of the detector 26 about a circular path whose center is coincident with the incident electron beam...