Dismiss
InnovationQ will be updated on Sunday, Oct. 22, from 10am ET - noon. You may experience brief service interruptions during that time.
Browse Prior Art Database

Quick Aligning, Dual Focus, Sensor Heads for Evaporation

IP.com Disclosure Number: IPCOM000046829D
Original Publication Date: 1983-Aug-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

Brown, WW: AUTHOR [+4]

Abstract

This article concerns method and apparatus for aligning film thickness monitors with evaporation sources in a vacuum deposition system. The method and apparatus feature a thickness monitor having two sensor heads which are adjusted so as to be aligned with the deposition sources by means of an adjusting rod built into the assembly. Additionally, existing flat shields used in conventional sensors are replaced by stainless steel tubes of different lengths which serve to focus the evaporant and eliminate any possibility of a first sensor from sensing materials from a second source. Crystal monitors are used to measure film thickness of material deposited on a substrate in a vacuum system. These monitors include heads which must be removed at every tooling and bell jar change for cleaning.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 53% of the total text.

Page 1 of 2

Quick Aligning, Dual Focus, Sensor Heads for Evaporation

This article concerns method and apparatus for aligning film thickness monitors with evaporation sources in a vacuum deposition system. The method and apparatus feature a thickness monitor having two sensor heads which are adjusted so as to be aligned with the deposition sources by means of an adjusting rod built into the assembly. Additionally, existing flat shields used in conventional sensors are replaced by stainless steel tubes of different lengths which serve to focus the evaporant and eliminate any possibility of a first sensor from sensing materials from a second source. Crystal monitors are used to measure film thickness of material deposited on a substrate in a vacuum system. These monitors include heads which must be removed at every tooling and bell jar change for cleaning. The sensor heads are bolted to the inside of the vacuum chamber and, accordingly, the only adjustment to realign the sensor head to the evaporator source is to bend the head. This method is trial and error, and can take up to one and one-half days to align both heads correctly. After each head is bent, a test run must be made to check the indicated thickness at the substrate relative to actual thickness. The substrate upon which the material is deposited must be etched and read on a tally step to find its thickness. Additionally, where multiple sources are used in the evaporation system, multiple senses must also be employed....