Browse Prior Art Database

Disk Substrate Polisher

IP.com Disclosure Number: IPCOM000046895D
Original Publication Date: 1983-Aug-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 2 page(s) / 72K

Publishing Venue

IBM

Related People

Fox, DL: AUTHOR [+2]

Abstract

The polisher includes a pair of polishing pads 10 and 12 effective on the opposite sides of disk 14. Pad 10 is fixed with respect to center line 16, while pad 12 has three degrees of freedom with respect to center line 16. Drive flange 18 is fixed to drive shaft 20, and pad 10 is fixed to and is supported by both the flange and shaft. Pad 12 is supported by outer flange 22 constituting a part of outer drive part 24 and is also supported by inner drive part 26 disposed within part 24. Part 26 is fixed with respect to part 24 by any suitable means, such as by means of screws 28. Inner drive part 26 has a cavity 30 therein of hexagonal cross section, and a hexagonal drive head 32 is fixed onto drive shaft 34 and functions to drive members 30 and 24, flange 22 and pad 12.

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Disk Substrate Polisher

The polisher includes a pair of polishing pads 10 and 12 effective on the opposite sides of disk 14. Pad 10 is fixed with respect to center line 16, while pad 12 has three degrees of freedom with respect to center line 16. Drive flange 18 is fixed to drive shaft 20, and pad 10 is fixed to and is supported by both the flange and shaft. Pad 12 is supported by outer flange 22 constituting a part of outer drive part 24 and is also supported by inner drive part 26 disposed within part 24. Part 26 is fixed with respect to part 24 by any suitable means, such as by means of screws 28. Inner drive part 26 has a cavity 30 therein of hexagonal cross section, and a hexagonal drive head 32 is fixed onto drive shaft 34 and functions to drive members 30 and 24, flange 22 and pad 12. Metal bellows 35 is disposed about shaft 34 and head 32, and bellows 35 is attached onto a cylindrical attachment area 36 on drive part 24. The end of bellows 35 is fixed with any air-tight closure means with respect to shaft 34. Pads 10 and 12 function to hold disk 14 with its axis fixed, and auxiliary rollers 38 and 40 on one side of disk 14 and an auxiliary roller 42 on the other side of disk 14 assist pads 10 and 12 in this respect. Disk 14 is intended to be the substrate for a magnetic disk, and the conventional magnetic material is applied onto the two opposite surfaces of disk 14 after it has been polished by pads 10 and 12. For polishing, disk 14 is placed in contact with rollers 38, 40 and 42 and between pads 10 and 1...