Browse Prior Art Database

Center-Folding Tank Cover

IP.com Disclosure Number: IPCOM000047024D
Original Publication Date: 1983-Sep-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 2 page(s) / 38K

Publishing Venue

IBM

Related People

Cloutier, CF: AUTHOR

Abstract

This device is a cover intended for limiting chemical exhaust emissions from semiconductor wet process tanks while allowing easy access to the tank for process procedures. The cover is hinged along its longitudinal centerline with its outer corners free to move laterally in a track system. This allows the cover to be positioned open to the right or left side of a tank and prevents interference with processes such as product transfer or chemical changing. The cover is constructed from various plastic and fluorocarbon materials, allowing high mechanical strength, durability and chemical resistance. As shown in the figure, the cover 10 is made of two identical halves 11 and 12, each of which has an integral handle 13 built in and which are joined together by a sheet of tetrafluoride ethylene (not shown) which serves as a hinge.

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Center-Folding Tank Cover

This device is a cover intended for limiting chemical exhaust emissions from semiconductor wet process tanks while allowing easy access to the tank for process procedures. The cover is hinged along its longitudinal centerline with its outer corners free to move laterally in a track system. This allows the cover to be positioned open to the right or left side of a tank and prevents interference with processes such as product transfer or chemical changing. The cover is constructed from various plastic and fluorocarbon materials, allowing high mechanical strength, durability and chemical resistance. As shown in the figure, the cover 10 is made of two identical halves 11 and 12, each of which has an integral handle 13 built in and which are joined together by a sheet of tetrafluoride ethylene (not shown) which serves as a hinge. At each corner of the cover opposite to the handles are slides 14 having external fingers 15 which engage slide rails, 16 and 17, mounted on a rectangular flange 18. The flange 18 not only supports the rails but also provides a sealing surface to the tank assembly (not shown) when the flange is mounted on the tank. The rails are used to provide retention and guidance to the cover during its motion. A track 19 with a detent (not shown) at each end for the capture of the fingers on each slide is incorporated in each rail. Engagement of the cover slides in the rails and detents allows the cover to remain in a fully-open position with no external support. The detents in the rail also aid in control of the cover's motion during opening and closing. Grasping and lifting the right handle to the right causes the right cover half to rotate the fingers on i...