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Acceleration of Ablative Photoetching of Polymers

IP.com Disclosure Number: IPCOM000047487D
Original Publication Date: 1983-Nov-01
Included in the Prior Art Database: 2005-Feb-07
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Leigh, WJ: AUTHOR [+2]

Abstract

Controlled dry-etching of a variety of polymers containing carbon, hydrogen, oxygen, and nitrogen can be achieved by the use of far-UV radiation of wavelengths less than 220 nm. By irradiating the polymers with this radiation, bond-breaking of the polymer chains is achieved and the broken fragments explode, or ablate, from the polymer. In order to prevent the broken bonds from recombining as free radicals, a pure oxygen atmosphere having a pressure of at least one atmosphere is used. When these polymers are photoetched with wavelengths less than 220 nm, volatile products, such as CO and CO2, are produced. Another volatile product is benzene. The quantum yield of benzene formation is surprisingly large.

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Acceleration of Ablative Photoetching of Polymers

Controlled dry-etching of a variety of polymers containing carbon, hydrogen, oxygen, and nitrogen can be achieved by the use of far-UV radiation of wavelengths less than 220 nm. By irradiating the polymers with this radiation, bond-breaking of the polymer chains is achieved and the broken fragments explode, or ablate, from the polymer. In order to prevent the broken bonds from recombining as free radicals, a pure oxygen atmosphere having a pressure of at least one atmosphere is used. When these polymers are photoetched with wavelengths less than 220 nm, volatile products, such as CO and CO2, are produced. Another volatile product is benzene. The quantum yield of benzene formation is surprisingly large. In order to suppress the quantum yield of benzene formation, a pure oxygen atmosphere is used, the oxygen diffusing into the polymer film to trap the free radicals that are present. The oxygen pressure should be at least one atmosphere, and a convenient working pressure is five atmospheres. The absorption of radiation of wavelengths less than 220 nm is not significantly great if the path length of the ultraviolet beam in oxygen is kept to a minimum. Other oxidizing gasses which are also effective in accelerating the rates of ablation are N2O and NO.

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