Browse Prior Art Database

Alternate Method to Wire Feeding Evaporation Charge

IP.com Disclosure Number: IPCOM000047815D
Original Publication Date: 1983-Dec-01
Included in the Prior Art Database: 2005-Feb-08
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Brown, WW: AUTHOR [+3]

Abstract

This article concerns a method for replenishing the evaporation charges at the end of one run and prior to the beginning of the next in a process for depositing alternate layers of aluminum-copper and chrome to form a multilayer metallization structure. The method features the elimination of the need for the wire feeding amounts of aluminum-copper evaporation charge to the evaporator. Instead, premeasured amounts of aluminum-copper are loaded into a number of source pockets of a multi-pocket electron beam evaporation gun and the pockets are sequenced during evaporation such that multiple runs can be achieved with a single loading. In the course of depositing a multilayer metallization having at least one layer of aluminum-copper and one of chrome, it is necessary to replenish the aluminum-copper source after each run.

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Alternate Method to Wire Feeding Evaporation Charge

This article concerns a method for replenishing the evaporation charges at the end of one run and prior to the beginning of the next in a process for depositing alternate layers of aluminum-copper and chrome to form a multilayer metallization structure. The method features the elimination of the need for the wire feeding amounts of aluminum-copper evaporation charge to the evaporator. Instead, premeasured amounts of aluminum-copper are loaded into a number of source pockets of a multi-pocket electron beam evaporation gun and the pockets are sequenced during evaporation such that multiple runs can be achieved with a single loading. In the course of depositing a multilayer metallization having at least one layer of aluminum-copper and one of chrome, it is necessary to replenish the aluminum-copper source after each run. The chrome source, on the other hand, need be replenished only after multiple runs. Typically, the aluminum-copper replenishment is accomplished by feeding aluminum-copper wire of predetermined lengths into an evaporation crucible. Because of the lack of accuracy and reliability associated with wire feeding, the method of wire feeding has been found to be time consuming and irregular in use. As an alternative to wire feeding the aluminum-copper source, this article proposes a method which features the use of an electron beam evaporation gun having four turret-mounted source pockets which may be seq...