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Pellicle Trim Tool

IP.com Disclosure Number: IPCOM000048116D
Original Publication Date: 1981-Dec-01
Included in the Prior Art Database: 2005-Feb-08
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Related People

Fox, DD: AUTHOR

Abstract

This article describes a tool for trimming films and is especially useful for rapidly and cleanly trimming the excess film from a pellicle assembly for use with a semiconductor device.

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At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 85% of the total text.

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Pellicle Trim Tool

This article describes a tool for trimming films and is especially useful for rapidly and cleanly trimming the excess film from a pellicle assembly for use with a semiconductor device.

Pellicles as used in semiconductor masks are widely known and basically comprise a film stretched across a mounting ring which is mounted on a semiconductor mask and protects the masks from dust particles while maintaining the dust particles out of the focal plane of the mask.

In the past, trimming of such masks has been difficult. The figure shows a tool 10 generally sued for trimming the pellicle film 11 which is shown mounted on a pellicle ring 12 and supported in a stretching base 13. The tool utilizes three legs 16, 17, and 18, each one having a cutting wheel at the bottom thereof and carried by an upper member 15 in fixed position. The leg 16 is mounted onto the carrier plate 15 by a suitable pivoting mechanism and has an extending finger 19 which is biased by a spring 20 so as to pull the member 19 tight against the T-bar plunger 21 which passes through a suitable opening in the support member 15. By pressing down on the T-bar member 21, the leg 16 can be made to spring out away from the pellicle. In operation, the T-bar member 21 is depressed and leg 16 is open, and the entire tool is placed around the pellicle ring 12 such that the wheels on each of the legs engage a groove 14 on the pellicle ring. The T-bar is then released and the spring load at leg 16...