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Browse Prior Art Database

Programmable Z Stage

IP.com Disclosure Number: IPCOM000048168D
Original Publication Date: 1981-Dec-01
Included in the Prior Art Database: 2005-Feb-08
Document File: 2 page(s) / 61K

Publishing Venue

IBM

Related People

Lachtrupp, D: AUTHOR [+2]

Abstract

This Z-Stage assembly is used for supporting and elevating a semiconductor wafer, held by a vacuum chuck, during testing operation. The wafer, mounted on the chuck, is pushed upwardly into contact with a contact probe that makes electrical contact with the pads on the wafer.

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Programmable Z Stage

This Z-Stage assembly is used for supporting and elevating a semiconductor wafer, held by a vacuum chuck, during testing operation. The wafer, mounted on the chuck, is pushed upwardly into contact with a contact probe that makes electrical contact with the pads on the wafer.

In the 2-Stage, a lift drive motor 10 is mounted on gear reduction housing 12 with driving pinion gear 14 in driving engagement with drive gear 16 through idler gear 18. Drive gear 16 is attached to an upwardly extending support 20 on which are mounted laterally extending cam followers 22. Gear 16 is rotatably supported on bearings 24 and 26, as indicated by curved arrow 28. Elevator housing 30, provided with a spindle 32, is mounted for vertical movement in housing 34 by die set bearings 36. Slots in spindle 32 form can surfaces 38 that interact with cam followers 22. It can be seen that by this arrangement, rotation of pinion 14 by motor 10 rotates gear 16 and cam followers 22 which raise and lower elevator housing 30 by engagement with camming surfaces 38. Rotatably mounted in elevator housing 30 is a drive spindle 40 mounted on bearings 42 and supporting a planar chuck 44 and theta drive gear 46. Bearings 48 provide additional support for the chuck 44 relative to elevator housing 30. A suitable worm gear 50, driven by a motor (not shown), engages theta drive gear 46 to provide a precise angular positioning of the chuck 44.

This Z-Stage has increased structural rigidit...