Browse Prior Art Database

Quantizer for Bent Chip Monitor

IP.com Disclosure Number: IPCOM000048169D
Original Publication Date: 1981-Dec-01
Included in the Prior Art Database: 2005-Feb-08
Document File: 2 page(s) / 54K

Publishing Venue

IBM

Related People

Fouts, DP: AUTHOR [+4]

Abstract

A quantizer for a bent chip monitor is made by providing a stepped slit configuration on a rigid transparent piece of plastic, to be held at a fixed distance between the eye of the viewer and the chips or wafer being analyzed. This stepped slit provides an instant quantitative measure of the amount of line distortion, and hence the amount of curvature of the chip or wafer or disc.

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Quantizer for Bent Chip Monitor

A quantizer for a bent chip monitor is made by providing a stepped slit configuration on a rigid transparent piece of plastic, to be held at a fixed distance between the eye of the viewer and the chips or wafer being analyzed. This stepped slit provides an instant quantitative measure of the amount of line distortion, and hence the amount of curvature of the chip or wafer or disc.

The amount of distortion in the grid reflected image is determined by the stepped slit quantizer, as, for example, schematically illustrated in Figs. 1-3.

This type of a stepped slit quantizer removes much of operator dependence on the bent chip monitor. Further, by correlating the degree of distortion in the reflected image to the amount of bend in the chip and to the amount of stress required to produce such a distortion, a quantitative measure of the impact force likely to cause a crack in the SiO(2) can be determined.

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