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Inclined Specimen Support For Low Loss Scanning Electron Microscopy

IP.com Disclosure Number: IPCOM000048466D
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-08
Document File: 2 page(s) / 33K

Publishing Venue

IBM

Related People

Krakow, W: AUTHOR [+3]

Abstract

In performing scanning electron microscopy, it would be highly desirable to have a specimen support which holds a specimen at a precisely defined angle relative to the microscope optic axis. Such a support may be obtained by taking advantage of the fact that chemical etching of (001) Si wafers produces exposed (111) type planes which make precise angles of 54 Degrees 44 Degrees with the (001) planar surfaces of the Si.

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Inclined Specimen Support For Low Loss Scanning Electron Microscopy

In performing scanning electron microscopy, it would be highly desirable to have a specimen support which holds a specimen at a precisely defined angle relative to the microscope optic axis. Such a support may be obtained by taking advantage of the fact that chemical etching of (001) Si wafers produces exposed (111) type planes which make precise angles of 54 Degrees 44 Degrees with the
(001) planar surfaces of the Si.

Fabrication of an inclined specimen support is accomplished by the following steps:
1) A single crystal Si wafer of (100) orientation is polished on

one side.
2) A thin silicon dioxide film is grown on the polished surface

using thermal oxidation.
3) A photoresist layer is spin-coated onto the SiO(2), and a

stripe pattern is developed into the photoresist (Fig. 1).
4) The striped pattern is transferred into the silicon dioxide

by etching.
5) The photoresist is removed using acetone (Fig. 2).
6) The substrate is placed into an isotropic etchant for single

crystal silicon, e.g., a solution of ethylene diamene,

pyrocatechol and water, until the stripe pattern is etched

through the substrate (Fig. 3).
7) The silicon dioxide layer is removed by etching.
8) The patterned substrate is then scribed, diced and machined

into individual, inclined specimen supports (Fig. 4).

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