Browse Prior Art Database

Use Of Alternate O-Ring Material And Protective Sleeve

IP.com Disclosure Number: IPCOM000048536D
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-08
Document File: 2 page(s) / 33K

Publishing Venue

IBM

Related People

Bartlett, AR: AUTHOR

Abstract

In a number of semiconductor processing apparatus it is necessary to join two or more units by means of 0-rings compressed between the adjacent surfaces. When hot gases pass over the joint, rapid decay of the O-ring can occur, depending upon the temperature and composition of the gases and the ring itself. Even in the most destructive atmospheres it has now been found that such O-rings can have an extended life if a protective quartz sleeve is provided in the tube, such that it will prevent the gases from contacting the O-ring directly.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 91% of the total text.

Page 1 of 2

Use Of Alternate O-Ring Material And Protective Sleeve

In a number of semiconductor processing apparatus it is necessary to join two or more units by means of 0-rings compressed between the adjacent surfaces. When hot gases pass over the joint, rapid decay of the O-ring can occur, depending upon the temperature and composition of the gases and the ring itself. Even in the most destructive atmospheres it has now been found that such O-rings can have an extended life if a protective quartz sleeve is provided in the tube, such that it will prevent the gases from contacting the O-ring directly.

In the figure there is shown one end of a chamber 10 having an outlet tube 11 to which there is coupled an extension pipe 12. An O-ring 13 is compressed between the tube 11 of the chamber 10 and the pipe 12 to form a gas tight seal. In a number of processes hot gases are required in the chamber and these pass through the outlet 11 and the pipe 12. To prevent the gases from adversely affecting the O-ring 13 a protective quartz sleeve 14 is inserted in the mouth of the outlet tube so that it extends therethrough and into the pipe 12 past the O- ring 13.

Gases such as silicon tetrachloride, etc., at temperatures in the order of 1200 degree C are normally used in the apparatus. It has been found that the O-ring deteriorates in 50 hours or less in an apparatus without such a shield. However, when such a shield is used the life of the O-ring is greatly extended with flexibility and...