Browse Prior Art Database

Multiple Experiment Hot Process Vehicle

IP.com Disclosure Number: IPCOM000048591D
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-08
Document File: 2 page(s) / 57K

Publishing Venue

IBM

Related People

Hearn, EW: AUTHOR [+4]

Abstract

At present, single boats are used to run wafers in batch processing in order to see the effects of temperature, warpage, etc. Due to changes in boat or wafer configurations, several runs are required to simulate the desired changes. Any time delay between runs may cause perturbations in the data that could invalidate any comparisons (i.e, furnace failures between runs, gas flow changes, etc.). This article describes a structure that provides a multiple parameter vehicle that can be run in a single experiment, thus avoiding several individual boats and designs as well as saving appreciable experimental run times.

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Multiple Experiment Hot Process Vehicle

At present, single boats are used to run wafers in batch processing in order to see the effects of temperature, warpage, etc. Due to changes in boat or wafer configurations, several runs are required to simulate the desired changes. Any time delay between runs may cause perturbations in the data that could invalidate any comparisons (i.e, furnace failures between runs, gas flow changes, etc.). This article describes a structure that provides a multiple parameter vehicle that can be run in a single experiment, thus avoiding several individual boats and designs as well as saving appreciable experimental run times.

The proposed three-section boat is illustrated in Fig. 1. It is designed to hold about 20 wafers per section. Section A is comparable to the boats presently used in most product lines. It consists of slotted rails supported by welds only at joining members, leaving an entirely open boat. Section B is a repeat of section A modified by a quartz tube cut lengthwise and welded to the rails, forming a protected bottom. Section C is a repeat of section B except the quartz bottom is about twice the thickness of section B. A further feature is that the remaining half of the quartz tube cut lengthwise can be used as a top for sections B and C to form a closed boat with open ends.

Various configurations of furnace ramping, no ramping, quick insert/ withdrawal, with and without tops. or several combinations of each can be easi...