Browse Prior Art Database

Stage With Two Independent Probes For EBIC Evaluation in a SEM

IP.com Disclosure Number: IPCOM000048617D
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-08
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Mauduech, JC: AUTHOR

Abstract

During EBIC (electron-beam induced current) evaluations it is often desired to move independently two probes according to X, Y and Z coordinates and contact a silicon sample (without special padding) on very small geometries in order to detect the currents induced by the electron beam.

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Stage With Two Independent Probes For EBIC Evaluation in a SEM

During EBIC (electron-beam induced current) evaluations it is often desired to move independently two probes according to X, Y and Z coordinates and contact a silicon sample (without special padding) on very small geometries in order to detect the currents induced by the electron beam.

The aim is to take advantage of properties of PN junctions exposed to a beam of accelerated SEM (Scanning Electron Microscope) electrons The induced current signal is then used for the SEM picture through appropriate external circuitry. This current permits the characterization of juntion quality and therefore provides useful information with respect to process defects.

Standard stages do not usually provide the ability of further moving the sample when introduced in the vacuum chamber of the SEM, and then only provide limited measurements.

Therefore, the main advantage of the present stage is to be able to adjust each of the two probes independently on any contact point of the sample inside the chamber and, once the contacting is achieved, to be able to move the sample and the probes in X and Y directions. Each probe is controlled in X, Y and Z directions by knobs which are external to the chamber.

The sample is also controlled in X and Y directions by external knobs; however, the movements to the sample are simultaneously applied to the probes. The details of this stage, including eight control knobs (1 to 8), left an...