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Method For Fabrication of Optical Waveguide

IP.com Disclosure Number: IPCOM000048669D
Original Publication Date: 1982-Mar-01
Included in the Prior Art Database: 2005-Feb-09
Document File: 2 page(s) / 19K

Publishing Venue

IBM

Related People

Hewig, GH: AUTHOR [+2]

Abstract

A method for the fabrication of an optical waveguide by laser-annealing a selected width of an amorphous film is described.

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Method For Fabrication of Optical Waveguide

A method for the fabrication of an optical waveguide by laser-annealing a selected width of an amorphous film is described.

The strip waveguide is produced in an amorphous film 10 deposited on a suitable substrate 12 by laser-annealing a strip of the desired width in the amorphous film. This action produces a high index crystaline region 14 within the amorphous film. In the left figure, the annealed region 14 is surrounded on three sides by the original low index film, whereas in the right figure, the annealed region extends to the substrate.

If the waveguiding region is single-crystal, the waveguide can be used for nonlinear optical phenomena, such as harmonic generation. The large index increment provided by this method is a significant advantage because it makes the phase-matching possible over a wide range of wavelengths lengths.

For applications in integrated optics not involving nonlinear phenomena, polycrystalline films with grain size < Lambda are adequate. Complex waveguide structures, such as gratings, directional couplers, etc., can be fabricated by scanning the laser beam. It is also possible to make tapered waveguides (in the Z direction) by controlling the power and travel of the annealing laser.

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