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Browse Prior Art Database

Inorganic Conformal Coating For Implantable Electronic Devices

IP.com Disclosure Number: IPCOM000048768D
Original Publication Date: 1982-Mar-01
Included in the Prior Art Database: 2005-Feb-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Clark, HA: AUTHOR [+2]

Abstract

Implantable devices, such as pacemakers, or other devices in a corrosive ambient are protected from body fluids or the like by metallic hermetically sealed enclosures. If this seal is broken, the corrosive fluids are allowed into the package and immediate device failure may be caused. Therefore, a back-up seal has been sought. Many types of polymeric coatings have been tried each with major shortcomings such as adhesion loss, high water and ionic permeability, thickness uniformity, and ability to be reworked or removed from the device without damaging the circuitry.

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Inorganic Conformal Coating For Implantable Electronic Devices

Implantable devices, such as pacemakers, or other devices in a corrosive ambient are protected from body fluids or the like by metallic hermetically sealed enclosures. If this seal is broken, the corrosive fluids are allowed into the package and immediate device failure may be caused. Therefore, a back-up seal has been sought. Many types of polymeric coatings have been tried each with major shortcomings such as adhesion loss, high water and ionic permeability, thickness uniformity, and ability to be reworked or removed from the device without damaging the circuitry.

Silicon nitride, either low temperature plasma deposited or photochemically deposited, can be used either as a replacement for the polymer coating or in conjunction with a polymer coating to form a double device passivation. Silicon nitride has many advantages over polymers in that it is a conformal coating of uniform thickness, impermeable to water and ions, has good adhesion properties to many types of materials, and may be removed selectively and efficiently by plasma etching in CF(4)/O(2).

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