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Browse Prior Art Database

Universal Mask Holder For Different Mask Thicknesses

IP.com Disclosure Number: IPCOM000048783D
Original Publication Date: 1982-Mar-01
Included in the Prior Art Database: 2005-Feb-09
Document File: 2 page(s) / 48K

Publishing Venue

IBM

Related People

Kozlowski, LF: AUTHOR [+4]

Abstract

Commercial-type mask holders (e.g., Perkin Elmer) need lock/unlock screws for mask loading. The simple construction shown for guarding mask pellicle has a common design for various mask thicknesses, and can be modified as shown in the drawings, with very easy change-over from one size to another without adding or removing any parts. This modification also eliminates a need for having separate mask holders for commonly used production masks. These varied thicknesses can be accommodated by a simple change-over, as illustrated in Figs. 2 and 3.

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Universal Mask Holder For Different Mask Thicknesses

Commercial-type mask holders (e.g., Perkin Elmer) need lock/unlock screws for mask loading. The simple construction shown for guarding mask pellicle has a common design for various mask thicknesses, and can be modified as shown in the drawings, with very easy change-over from one size to another without adding or removing any parts. This modification also eliminates a need for having separate mask holders for commonly used production masks. These varied thicknesses can be accommodated by a simple change-over, as illustrated in Figs. 2 and 3.

Mask retainer guides are located in four corners, as shown in Fig. 1. They can be rotated by loosening the screw for various mask thicknesses. Once selected, they can be locked again.

A, B, C, D are four of the thicknesses shown in the Figs. 2 and 3. This unique mask retainer guide is located to clear corner-clamping or ring-clamping.

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