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Non-Corrosive Caro's Acid Stripping Solution

IP.com Disclosure Number: IPCOM000048994D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Kaplan, LH: AUTHOR

Abstract

The application Caro's (monoperoxy sulfuric) acid in stripping resist has been generally limited to lithographic levels before personalization of metal patterns. Levels involving aluminum metallurgy connected to the substrate generally require another stripping method because the electrolytic cell that is set up allows rapid reaction of the A1 with the Caro's acid, leading to severe attack during stripping.

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Non-Corrosive Caro's Acid Stripping Solution

The application Caro's (monoperoxy sulfuric) acid in stripping resist has been generally limited to lithographic levels before personalization of metal patterns. Levels involving aluminum metallurgy connected to the substrate generally require another stripping method because the electrolytic cell that is set up allows rapid reaction of the A1 with the Caro's acid, leading to severe attack during stripping.

It has been shown in U.S. Patent 4,165,295 that small amounts of fluorine- containing material, when added to certain classes of strippers, improve the attack of these on aluminum. Although limited to organic strippers. It has been found that this effect can be induced in inorganic strippers such as Caro's acid. Preliminary observations with 100 p.p.m. NH(4)F have shown a strong reduction in the rate of attack on A1 films. Optimization of Caro's acid formation can provide useful resist-stripping formulations at personalization levels.

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