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Static Free Semiconductor Carriers

IP.com Disclosure Number: IPCOM000049116D
Original Publication Date: 1982-May-01
Included in the Prior Art Database: 2005-Feb-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Gagne, M: AUTHOR [+2]

Abstract

Semiconductor wafers have normally been stored in plastic carriers. However, it has been found that many defects can be caused in such wafers due to high static charges in such plastic carriers.

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Static Free Semiconductor Carriers

Semiconductor wafers have normally been stored in plastic carriers. However, it has been found that many defects can be caused in such wafers due to high static charges in such plastic carriers.

To avoid such high static charges and at the same time prevent the dispersal of undesirable, conductive particles, carbon in the range of 11-16 percent may be mixed with polypropylene. By maintaining the carbon content in this range, the carrier does not build up a static charge and does not significantly outgas or permit its dispersal of carbon on the surface of the semiconductor wafer.

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