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Silane Adhesion Promoting Films

IP.com Disclosure Number: IPCOM000049144D
Original Publication Date: 1982-May-01
Included in the Prior Art Database: 2005-Feb-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Anderson, HR: AUTHOR [+3]

Abstract

The plasma deposition of a silane material onto a substrate forms an organosilane coating that has superior adhesion promotion properties with respect to a photoresist overcoat or a high temperature passivating polymeric overcoat. A plasma-deposited organosilane is a better adhesion promoter than a solution-deposited organosilane.

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Silane Adhesion Promoting Films

The plasma deposition of a silane material onto a substrate forms an organosilane coating that has superior adhesion promotion properties with respect to a photoresist overcoat or a high temperature passivating polymeric overcoat. A plasma-deposited organosilane is a better adhesion promoter than a solution-deposited organosilane.

A method of plasma depositing an organosilane coating includes the steps of forming a vapor of an organosilane, introducing the organosilane vapor into a reaction chamber, and subjecting the organosilane vapor to radio frequency energy so as to deposit an organosilane coating on a substrate in the reaction chamber. Gamma-aminopropyl triethoxysilane is a preferred silane material. Other silane materials are Ethynyltriethoxysilane, Vinyltriethoxysilane, Vinyltriecetoxysilane, Ethyltriethoxysilane and Gamma-Trifluoropropyl trimethoxysilane.

An example of a plasma-deposited organosilane that is used with a photoresist material is as follows: A silicon wafer with thermal SiO is plasma- cleaned, coated with plasma-deposited aminosilane and then the adhesion of the resist is tested in terms of floating image and tendency to withstand overdevelopment. It should be added that we found that there is a threshold thickness for silane to function as an adhesion promoter. For example, in the case of aminosilane it was 40 nm, and for vinylsilane it was 60 nm.

An example of a plasma-deposited organosilane that is used wi...