Browse Prior Art Database

Protective Cover for Pellicles in a Projection Printing System

IP.com Disclosure Number: IPCOM000049146D
Original Publication Date: 1982-May-01
Included in the Prior Art Database: 2005-Feb-09
Document File: 2 page(s) / 34K

Publishing Venue

IBM

Related People

Kraycir, JR: AUTHOR [+2]

Abstract

This article describes a frame for protecting ultra-thin ultraviolet light transparent pellicles against damage during handling and particularly during insertion and removal in the exposure tool.

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Protective Cover for Pellicles in a Projection Printing System

This article describes a frame for protecting ultra-thin ultraviolet light transparent pellicles against damage during handling and particularly during insertion and removal in the exposure tool.

U.S. Patent 4,131,363 describes the use of a transparent film or pellicle to protect a projection printing mask against physical damage and the deposition of particles. The pellicle was displaced from the mask so as to be out of focus and thus would not interfere with the clarity of the projection. Typically the mask was made of a tough MYLAR* film.

MYLAR is non-transparent to ultraviolet light. Therefore, if this typically ultra- thin quartz. While optically satisfactory, the quartz pellicle is extremely fragile and must itself be protected.

A protective frame and sliding cover is shown in the drawing wherein the mask plate 10 has attached pellicle frame 11, with pellicle film 12, provided with ways 13 in which cover 14 slides to cover the pellicle for protection or, when open, permit exposure. * Trademark of E. I. du Pont de Nemours & Co.

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