Browse Prior Art Database

Crucible for Silicon and Titanium Evaporation

IP.com Disclosure Number: IPCOM000049283D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Renken, H: AUTHOR

Abstract

It has been found that crucible problems associated with either silicon or titanium evaporation using RF as a power source can be avoided and overcome by providing a graphite crucible having a lining of pyrolytic graphite. Alternately, the crucible could be formed of pure pyrolytic graphite itself.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 1

Crucible for Silicon and Titanium Evaporation

It has been found that crucible problems associated with either silicon or titanium evaporation using RF as a power source can be avoided and overcome by providing a graphite crucible having a lining of pyrolytic graphite. Alternately, the crucible could be formed of pure pyrolytic graphite itself.

The pyrolytic graphite coating seals the graphite crucible surface, rendering it impervious to either the molten silicon or the molten titanium and molten tin, thus eliminating the problems associated with the crucibles used in the past for evaporation of these materials.

1