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Browse Prior Art Database

Micro-Probe

IP.com Disclosure Number: IPCOM000049305D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09
Document File: 2 page(s) / 123K

Publishing Venue

IBM

Related People

Dillman, DL: AUTHOR [+2]

Abstract

A multi-pin micro-probe for testing circuit chips can be fabricated inn less time by generating an artwork master, exposing glass and plastic film plates with a master, and drilling the glass probe guide plates with a laser.

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Micro-Probe

A multi-pin micro-probe for testing circuit chips can be fabricated inn less time by generating an artwork master, exposing glass and plastic film plates with a master, and drilling the glass probe guide plates with a laser.

Referring to the figure, a pair of glass guide plates 1, 2 are emulsified, exposed and developed from a msster transparancy, then drilled with a laser to provide openings for the probes. Exposed and developed plastic film can be used to inspect the hole locations of the glass. The two pieces of glass are placed with the mating drilled hole exits adjacent to present smooth outer surfaces. Beginning at the center of the glass, probe tubes 3 are inserted via corresponding holes in the fan-out member 4 into the drilled glass plates and fixed with a potting compound. The tubes are first emplaced containing temporary probe wires 6 which are subsequently replaced with spring-loaded adjustable probes.

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