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Internal Calibration Thickness Measurement Tool

IP.com Disclosure Number: IPCOM000049340D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Clark, LO: AUTHOR [+3]

Abstract

Operation and repeatability of thickness measurement tools, e.g., in internal calibration facility using internally mounted standards which represent the product under manufacture.

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Internal Calibration Thickness Measurement Tool

Operation and repeatability of thickness measurement tools, e.g., in internal calibration facility using internally mounted standards which represent the product under manufacture.

IR silicon measurement instruments require that calibration be performed to insure accuracy. This is often done by physically locating a "standard" on a stage and running the instrument through a measurement cycle. The results must have day to day repeatability. If more than one thickness is measured, a standard representing that thickness is required. The handling of these standards may result in breakage and depends to some degree on operator performance.

This proposal eliminates the operation problems by having internally mounted standards, which represent the product under manufacture. A tailored "standard" to "product" comparison can be made. The internal calibration feature may be accomplished in several ways. One method could use an arrangement where fragments of samples representing a range of epi thickness are being mounted on a disc where the rotation of the disc is controlled by a programmed motor. Each location of the disc may be used to represent a specific thickness of epitaxial material. By executing the "calibration" program, each sample on the disc is measured and the results are printed on a display screen or printer. The results must be repeatable long term. If not, it indicates machine malfunction. It is noted that the...