Browse Prior Art Database

Automatic Air-Tight Closing System for Diffusion Process Quartz Tube

IP.com Disclosure Number: IPCOM000049363D
Original Publication Date: 1982-Apr-01
Included in the Prior Art Database: 2005-Feb-09
Document File: 2 page(s) / 52K

Publishing Venue

IBM

Related People

Camus, R: AUTHOR [+2]

Abstract

For many thermal steps in standard semiconductor processing, e.g., diffusion and oxidation, the quartz boat containing the wafers to be processed is usually introduced manually in a quartz tube disposed in a high temperature furnace.

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Automatic Air-Tight Closing System for Diffusion Process Quartz Tube

For many thermal steps in standard semiconductor processing, e.g., diffusion and oxidation, the quartz boat containing the wafers to be processed is usually introduced manually in a quartz tube disposed in a high temperature furnace.

Manual loading presents some disadvantages, such as breakage risk and poor reproducibility. Therefore, fully automatic wafer loading unloading is highly desirable.

The system described herein provides in addition to the advantage of being automated (e.g., it may be fully computer-controlled, therefore allowing very low, slow-cooling rates) the assurance of a good airtight closing of the thermal step involved.

Figs. 1 and 2 schematically represent the side view and top view, respectively, of the system.

In the load station, the quartz paddle, while disposed on the paddle support, receives the boat containing the wafers.

The paddle support, the pushrod and the plug are activated by the arm. Under the action of the arm, both the paddle and the support are moved (the paddle support moves along two rails or guides until the abutments are reached). This corresponds to the situation shown in the figures, i.e., the support is close to the tube opening.

When the abutments are reached, this means that the paddle is fully inside the tube, and the support is lifted down thanks to the air cylinder. The pushrod may continue to move inside the tube, still pushing the paddle until...