Browse Prior Art Database

Improved Barrel Design for Chemical Thinning of Semiconductor Wafers

IP.com Disclosure Number: IPCOM000049699D
Original Publication Date: 1982-Jul-01
Included in the Prior Art Database: 2005-Feb-09
Document File: 2 page(s) / 48K

Publishing Venue

IBM

Related People

Hause, JR: AUTHOR [+2]

Abstract

This chemical thinning barrel design provides improved control over the final shape of semiconductor wafers by adding hydrofoil-like impellers rotated in planetary motion around the wafers to direct the flow of etching fluid over the wafers.

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Improved Barrel Design for Chemical Thinning of Semiconductor Wafers

This chemical thinning barrel design provides improved control over the final shape of semiconductor wafers by adding hydrofoil-like impellers rotated in planetary motion around the wafers to direct the flow of etching fluid over the wafers.

In the drawings, Fig. 1A shows the support and drive structure for the impellers, and Fig. 1B shows the support and drive structure for the wafer holder. Fig. 1C shows the structures as they would be assembled in the barrel, which is not shown.

The impellers 10 are mounted by means of integral reduced studs 10A in counterbores 11A and 12A in annular ring 11 and disc 12, respectively by means of setscrews (not shown) to permit the angles of attack of the hydrofoil-like impellers to be adjusted for controlling the fluid flow. The impellers, of which only two are illustrated (there may be more), are rotated by means of gears 13 and 14 which are journalled in frame member 15.

The wafers 16 are edge mounted in a cage 17 having spud shafts 17A and 17B and drum and gear assembly 18. Shaft 17A is journalled in the pilot bearing 12B in disc 12 and shaft 17B is journalled in frame member 15, when the wafer cage is assembled with the impeller, as shown in Fig. 1C, wherein the annular ring 11 slips over and rotates with respect to the drum 18.

The frame structure 15 is part of the barrel structure (not shown) which is mounted for rotation about the centers of shafts 19...