Browse Prior Art Database

Manual Input/ Output Box Loader/ Unloader

IP.com Disclosure Number: IPCOM000049713D
Original Publication Date: 1982-Jul-01
Included in the Prior Art Database: 2005-Feb-09
Document File: 3 page(s) / 64K

Publishing Venue

IBM

Related People

Freebern, TH: AUTHOR

Abstract

Shown in Fig. 1 is a modification of the manual input/output (MIO) boxes of U.S. Patent 4,014,576 for loading and unloading silicon wafers.

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Manual Input/ Output Box Loader/ Unloader

Shown in Fig. 1 is a modification of the manual input/output (MIO) boxes of U.S. Patent 4,014,576 for loading and unloading silicon wafers.

Principle of Operation

This unit has a louvered air bed which floats the wafer a few thousandths of an inch off the bed. By tilting the bed in the direction you want the wafer to travel, the wafer will float into or out of an MIO box which also floats wafers on a bed or air. (Refer to U.S. Patent 4,014,576). Vacuum ports are used to control where and when the wafers are stopped. When vacuum is applied to the vacuum port, the wafer is pulled down to the bed and held there.

Operation of Unit

Loading, Procedure:

Insert the MIO box into the air bed bracket. The air bed has five ports (Fig. 2) that couple the MIO box to the air bed. The air bed supplies the necessary air and vacuum to allow the MIO box to operate properly. By opening a vacuum toggle switch S3 (Fig. 3) the MIO box door will open. The door has to be open to allow a wafer to enter.

Place a wafer on the air bed. It will be held in place by vacuum applied to the vacuum ports through a vacuum toggle switch S4 (Fig.3). By closing the toggle switch, the vacuum is stopped and the wafer will float on the air bed. By using directional air louvers in the bed, the wafer is forced into the MIO box where the directional air louvers in the MIO box take over and force the wafer to vacuum ports where vacuum is applied through a vacuum switch. The wafer is pulled down onto these vacuum ports.

At this point, when the air bed is tilted down, the vacuum ports holding the wafer in the MIO box will...