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Purgeless Sample Chamber for IRFT Spectrometers

IP.com Disclosure Number: IPCOM000049761D
Original Publication Date: 1982-Jul-01
Included in the Prior Art Database: 2005-Feb-09
Document File: 2 page(s) / 69K

Publishing Venue

IBM

Related People

Cadwallader, RH: AUTHOR

Abstract

An infrared Fourier Transform (IRFT) spectrometer 1 has an optical bench 2, a detector chamber 3 and a test chamber 4 uniquely designed to allow samples to be tested rapidly, one at a time, without having to purge the spectrometer between each sample. In Fig. 1, the sample is held in fixture 5 supported between two cones 6 connected to the walls of bench 2 and chamber 3. The cones are shaped to surround the conically shaped beams 7 of IR energy which are focused upon and passed through a sample contained within fixture 5.

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Purgeless Sample Chamber for IRFT Spectrometers

An infrared Fourier Transform (IRFT) spectrometer 1 has an optical bench 2, a detector chamber 3 and a test chamber 4 uniquely designed to allow samples to be tested rapidly, one at a time, without having to purge the spectrometer between each sample. In Fig. 1, the sample is held in fixture 5 supported between two cones 6 connected to the walls of bench 2 and chamber 3. The cones are shaped to surround the conically shaped beams 7 of IR energy which are focused upon and passed through a sample contained within fixture 5.

As shown in Fig. 2, fixture 5 includes a slide 18 movable (between the full line position and the dotted line position) under the bias of springs 10. A sample to be tested, such as a semiconductor wafer 11, is placed in a holder 12 which can then be inserted into fixture 5 so as to move slide 18. Fixture 5 is air tight, end holder 12 is designed not to admit any air as it is pushed into place. Spring clips 13 on the holder will retain the sample in place for testing. Upon removal, slide 18 will move upwardly to prevent any outside air from entering the system.

In the alternative shown in Fig. 3, cones 6 terminate at the sample position a slight distance apart for receiving a flat sample 11'. A positive pressure is maintained within cones 6 so that there will be a slight outflow from the space between the cones. When wafer 11' is inserted for testing, this slight outflow continues so that no moistur...