Browse Prior Art Database

Air-Knife Particle Detection System

IP.com Disclosure Number: IPCOM000049890D
Original Publication Date: 1982-Aug-01
Included in the Prior Art Database: 2005-Feb-09
Document File: 2 page(s) / 27K

Publishing Venue

IBM

Related People

Ross, T: AUTHOR

Abstract

Two collimated, oppositely directed light beams are used to examine green sheet surfaces at glancing angles of incidence to visually detect particle contamination.

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Air-Knife Particle Detection System

Two collimated, oppositely directed light beams are used to examine green sheet surfaces at glancing angles of incidence to visually detect particle contamination.

By using various cleaning techniques, such as air knives, the green sheets are cleaned. It is then necessary to inspect the sheet for particle contamination. The use of a special lighting system enables an operator to visually scan a green sheet after air-knife cleaning. The system uses two sources of high intensity light directed through respective collimating lenses which projects the light at low angles to the green sheet. The green sheet becomes dark and particles above one mil scatter light to form light points which can be clearly seen by an operator.

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