Browse Prior Art Database

Four Point Probe Fixture with Single Degree of Freedom

IP.com Disclosure Number: IPCOM000050086D
Original Publication Date: 1982-Sep-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

Burbank, KE: AUTHOR [+3]

Abstract

During precise four point probe resistance measurements of narrow circuit line segments of plated copper, it is essential that: 1. the on-center spacing of the voltage probes must be maintained throughout testing, and 2. the probe assembly must register in the same manner onto the subject line segment throughout testing from sample to sample.

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Four Point Probe Fixture with Single Degree of Freedom

During precise four point probe resistance measurements of narrow circuit line segments of plated copper, it is essential that: 1. the on-center spacing of the voltage probes must

be maintained throughout testing, and

2. the probe assembly must register in the same manner

onto the subject line segment throughout testing from

sample to sample.

These requirements satisfy the need for: (1) measurements that are independent of the length of bulk material under test, and (2) reduced experimental error during measurement by constraining the travel of the probes to a repeatable well defined path. Thus, by application of, constraints, the degrees of freedom of the contact system are reduced, allowing repeatability of contact from sample to sample. A significant advantage realized in the probe system is that it is not affected by operator interaction.

The four point probe fixture 1 is connected to the electrical measurement instrument 2 by means of interconnecting wires. The fixture 1 is mounted on an X-Y table 3, allowing the sample 4 to be positioned for fourpoint probe testing by means of X and Y translational motion. When the sample 4 has been properly positioned, such that the inner probe pair straddles the line segment of interest, the operator pushes the probe fixture 1 manually until contact with the subject under test 4 is indicated by the electronic measurement system 2. Following the measurement, the operat...