Browse Prior Art Database

Flexible Extraction Electrode with In Situ Adjustment

IP.com Disclosure Number: IPCOM000050105D
Original Publication Date: 1982-Sep-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

McKenna, CM: AUTHOR

Abstract

This article concerns an adjustable extraction electrode assembly to be used in an ion implantation apparatus. The electrode assembly features a two element structure in which a first resilient element overlays a second rigid element so that the first element may be expanded relative to the second when a gas is pumped into the region of interface between the two elements. In preferred form, the second element itself may consist of a resilient member backed with a conforming rigid member, such as a metal plate.

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Flexible Extraction Electrode with In Situ Adjustment

This article concerns an adjustable extraction electrode assembly to be used in an ion implantation apparatus. The electrode assembly features a two element structure in which a first resilient element overlays a second rigid element so that the first element may be expanded relative to the second when a gas is pumped into the region of interface between the two elements. In preferred form, the second element itself may consist of a resilient member backed with a conforming rigid member, such as a metal plate.

In an ion implantation apparatus, in order to operate over a range of accelerating voltages and beam currents, and to adjust the beam spot size or the path of the beam through the apparatus, it is desirable to shape the aperture of the extraction electrode. In conventional apparatus, these types of adjustments would require the apparatus to be shut down and the extraction electrode physically modified.

In accordance with the extraction electrode assembly of this article, the shaping of the electrode can be produced without shutting the ion implantation apparatus down. The electrode assembly 1, as shown in Fig. 1, consists of a first thin disc 2 of flexible material, for example, silicon rubber, which is bonded at its circumference 3 and at the extraction aperture edge 4 to an identical second disc 5. Second disc 5 is in turn bonded to a flat metallic plate 6. First disc 2 is coated with a metallic film 7...