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Apparatus for Multilayer Liquid Phase Epitaxy

IP.com Disclosure Number: IPCOM000050183D
Original Publication Date: 1982-Sep-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 2 page(s) / 92K

Publishing Venue

IBM

Related People

Nievergelt, H: AUTHOR [+3]

Abstract

In multilayer liquid-phase epitaxy (LPE) a substrate has to be brought repetitively in contact with appropriate growing solutions which should not become mixed or contaminated.

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Apparatus for Multilayer Liquid Phase Epitaxy

In multilayer liquid-phase epitaxy (LPE) a substrate has to be brought repetitively in contact with appropriate growing solutions which should not become mixed or contaminated.

A block of inert material has a continuous channel machined into it, the depth of which varies along each branch thereof, as shown in the figure. The liquids from which the layers are grown can be moved through this channel by tilting the block back and forth. By tilting forwardly, the liquids assumed to be originally contained in the deep parts of the channel at the front of the block, will be moved to the subsequent shallow parts and on to the subsequent deep parts. As the block is tilted back, the liquids are moved against the front of the block and on to the deep parts of the channel, and now having exchanged positions. Thus, the liquids move only in one direction without ever returning as they always find a deeper part of a channel downstream. The figure illustrates the principle with a simplified geometry for a two liquid process. Multiplication of the pattern would provide for an arbitrary number of liquids in a single continuous channel.

The substrates may be placed anywhere on the bottom or sidewall of the channels so that the liquids may alternately flow over them for predetermined periods of time. Obviously, long term growth is possible with the substrates located at the deepest parts of the channel.

The entire block may be closed by...