Browse Prior Art Database

Manual X-Y Wafer Positioner

IP.com Disclosure Number: IPCOM000050338D
Original Publication Date: 1982-Oct-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 2 page(s) / 43K

Publishing Venue

IBM

Related People

Cadwallader, RH: AUTHOR

Abstract

Semiconductor wafers are quite often tested by being mounted on an X-Y table for movement between various positions. For example, the wafer might be moved relative to an optical system for measuring the thickness of the wafer or of an epitaxial layer. Shown in the drawing is a manually actuated positioner adapted to be connected to one platform of an X-Y table for positioning a wafer mounted in the table, in a plurality of predetermined positions.

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Manual X-Y Wafer Positioner

Semiconductor wafers are quite often tested by being mounted on an X-Y table for movement between various positions. For example, the wafer might be moved relative to an optical system for measuring the thickness of the wafer or of an epitaxial layer. Shown in the drawing is a manually actuated positioner adapted to be connected to one platform of an X-Y table for positioning a wafer mounted in the table, in a plurality of predetermined positions.

The positioner includes a vertical pivot arm 1 connected by spring 1A to X platform 2 for imparting motion through the X platform to both platforms. Platform 2 moves along ways 3 in the X direction.

A base plate 4 supports the ways and table and additionally supports a template 5.

Mounted on the end of arm 1 is a key pin assembly 6 which includes a downwardly extending pin (not shown) that fits into and moves along a positioning groove 7 in template 5. Associated with groove 7 are a plurality of rectangularly shaped depressions 8 which cooperate with a similarly shaped rectangular block 9 so that by positioning the block in one of the locating depressions 8, the X-Y table is moved to a predetermined position to thereby position the wafer.

Key pin assembly 6 further includes a manually operated knob 10 which is connected through a shaft to rectangular block 9 for raising the block above template 5, allowing it to be moved into and out of depressions 8. A compression spring 11 retains block 9 i...