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Browse Prior Art Database

Mirror Tunnel Alignment System

IP.com Disclosure Number: IPCOM000050594D
Original Publication Date: 1982-Nov-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 2 page(s) / 45K

Publishing Venue

IBM

Related People

Mathisen, ES: AUTHOR

Abstract

This arrangement relates to an optical system for the purpose of aligning a chip to the site of a substrate or a similar operation. The system employs the basic method of alignment of two superimposed images obtained from a moveable optic assembly inserted between the vacuum probe holding the chip and the substrate which is supported by an X-Y stage and having means for centering adjustment.

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Mirror Tunnel Alignment System

This arrangement relates to an optical system for the purpose of aligning a chip to the site of a substrate or a similar operation. The system employs the basic method of alignment of two superimposed images obtained from a moveable optic assembly inserted between the vacuum probe holding the chip and the substrate which is supported by an X-Y stage and having means for centering adjustment.

After the alignment has been performed (automatic or manual), the optic assembly is retracted and the chip is moved downward for chip joining. The novelty of the system is the method of superimposition, described by reference to Figs. 1 and 2. An object 1, for example, a transparency illuminated by a light beam 2 is projected by the lens 3 on to a screen 4 where an inverted image of the object pattern is visible. In Fig. 2, a mirror tunnel 5 with appropriate dimensions is inserted between the lens and the screen, as shown. The screen is placed close to the exit port of the tunnel, and the image of each element of the object superimposed.

Fig. 3 shows one embodiment of the principle of this system. The chip 11 is held in position by a vacuum probe (not shown). The image of the chip is transmitted by the penta prism 12 to the lens 13. The right-angle prism 14 transmits the image of the substrate site 16 to the lens 13. The mirror tunnel 15 superimposes the two images, producing an overlay at the exit port of the mirror tunnel. This image is then p...