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Browse Prior Art Database

Oxygen Cracker System

IP.com Disclosure Number: IPCOM000050667D
Original Publication Date: 1982-Dec-01
Included in the Prior Art Database: 2005-Feb-10
Document File: 2 page(s) / 37K

Publishing Venue

IBM

Related People

Polcari, MR: AUTHOR [+2]

Abstract

In certain semiconductor processes using oxygen, it is desirable to reduce the methane level below that resulting from evaporation of a liquid O(2) source. A system for cracking the methane from the O(2) and removing the water by-product is constructed and operates as follows:

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Oxygen Cracker System

In certain semiconductor processes using oxygen, it is desirable to reduce the methane level below that resulting from evaporation of a liquid O(2) source. A system for cracking the methane from the O(2) and removing the water by- product is constructed and operates as follows:

Referring to the figure, the main component of the system is a cracker tube 11 for heating the oxygen, consisting of a thick walled, fused quartz tube filled with 1/4" diameter hollow quartz rods. The cracker tube in the illustrated embodiment might be 36" long and 4" in diameter, providing increased heat exchange between the furnace and the gas. Inlet and outlet stems 13 and 15, respectively, of the tube extend beyond the furnace. All external plumbing is of stainless steel. The outlet stem 15 is pre-cooled by an external wrap-around copper coil 17 connected to the facility-chilled water system. This allows protection of the TEFLON(Trademark fo E. I. du Pont de Nemours & Co.) glass to metal coupling at the end of the tube.

The oxygen is further cooled prior to drying by use of a commercial heat exchange coil 18 consisting of a stainless steel inner coil for oxygen flow and a copper outer cooling coil connected to the facility chilled water system. The entire system is protected from overpressure by use of a stainless steel pressure relief valve 21 connected to an atmosphere vent. The remaining components represent conventional water or gas transfer components, test a...